✦ LIBER ✦
A new detection technique of crystalline defects by sheet resistance measurement on multicrystalline silicon wafers
✍ Scribed by Fathi, Mohamed; Bouhafs, Djoudi
- Book ID
- 121856228
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 987 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0268-1242
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