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A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism

✍ Scribed by Mei-Yung Chen; Hsuan-Han Huang; Shao-Kang Hung

Book ID
117919085
Publisher
IEEE
Year
2010
Tongue
English
Weight
935 KB
Volume
57
Category
Article
ISSN
1932-4529

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