✦ LIBER ✦
A new contact plug technique for deep-submicrometer ULSI is employing selective nickel silcidation of polysilicon with a titanium nitride stopper
✍ Scribed by Iijima, T.; Nishiyama, A.; Ushiku, Y.; Ohguro, T.; Kunishima, I.; Suguro, K.; Iwai, H.
- Book ID
- 114534994
- Publisher
- IEEE
- Year
- 1993
- Tongue
- English
- Weight
- 782 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0018-9383
No coin nor oath required. For personal study only.