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A New Computer Model of the MOCVD Process, The Active Species Concentrations in a Horizontal Reactor

โœ Scribed by Brozi, A.


Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
352 KB
Volume
129
Category
Article
ISSN
0031-8965

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๐Ÿ“œ SIMILAR VOLUMES


Effect of embedding a porous medium on t
โœ C.H. Lin; W.T. Cheng; J.H. Lee ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 989 KB

This paper investigates numerically the effect of embedding a porous medium on the deposition rate in a two-dimensional (2-D) axi-symmetric vertical rotating metalorganic chemical vapor deposition (MOCVD) reactor. The 2-D Navier-Stokes, thermal-energy, and mass transfer equations as well as the wall