✦ LIBER ✦
A new cleaning process combining non-ionic surfactant with diamond film electrochemical oxidation for polished silicon wafers
✍ Scribed by Baohong, Gao; Yadong, Zhu; Yuling, Liu; Shengli, Wang; Qiang, Zhou; Xiaoyan, Liu
- Book ID
- 121421037
- Publisher
- IOP Publishing
- Year
- 2010
- Tongue
- English
- Weight
- 745 KB
- Volume
- 31
- Category
- Article
- ISSN
- 1674-4926
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