✦ LIBER ✦
A new chemical etch for defects studies in very thin film (< 1000 Å) SIMOX material
✍ Scribed by L.F. Giles; A. Nejim; P.L.F. Hemment
- Book ID
- 113300293
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 694 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0254-0584
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