A new approach towards low-pressure metalorganic vapor phase epitaxy of (AlGa)As using triethylgallium and dimethylethylaminealane

✍ Scribed by Hilde Hardtdegen; Chr. Ungermanns; M. Hollfelder; T. Raafat; R. Carius; St. Hasenöhrl; H. Lüth

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 646 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91095-2