✦ LIBER ✦

A NEW APPROACH FOR DETECTING DEFECTS IN BONDED MEMS DEVICES

✍ Scribed by G. Horn; T. Mackin; J. Lesniak; Brad Boyce

Book ID: 111371820
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 555 KB
Volume: 28
Category: Article
ISSN: 0732-8818
DOI: 10.1111/j.1747-1567.2004.tb00181.x

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