✦ LIBER ✦
A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy
✍ Scribed by U. Neuhäusler; J. Lin; A. Oelsner; M. Schicketanz; D. Valdaitsev; J. Slieh; N. Weber; M. Brzeska; A. Wonisch; T. Westerwalbesloh; A. Brechling; H. Brückl; M. Escher; M. Merkel; G. Schönhense; U. Kleineberg; U. Heinzmann
- Book ID
- 108207556
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 251 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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