A new apparatus for deep patterning of beam sensitive targets by means of high-energy ion beam

✍ Scribed by A. Rovelli; A. Amato; D. Botta; A. Chiodoni; R. Gerbaldo; G. Ghigo; L. Gozzelino; F. Laviano; B. Minetti; E. Mezzetti

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 363 KB
• Volume: 240
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.06.208