✦ LIBER ✦
A new algorithm for real-time thin film thickness estimation given in situ multiwavelength ellipsometry using an extended Kalman filter
✍ Scribed by C.G. Galarza; P.P. Khargonekar; N. Layadi; T.L. Vincent; E.A. Rietman; J.T.C. Lee
- Book ID
- 114086299
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 256 KB
- Volume
- 313-314
- Category
- Article
- ISSN
- 0040-6090
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