✦ LIBER ✦
A new air film technique for low contact handling of silicon wafers : J. A. Paivanas and J. K. Hassan. Solid-St. Technol. 148 (April 1980)
- Book ID
- 103275382
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 134 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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