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A new a.c. sputtering technique for the deposition of thin films : H. Y. Kumagai. IEEE Trans. Parts, Hybrids PackngPHP-8, No. 3, September (1972), p. 7

Publisher: Elsevier Science
Year: 1973
Tongue: English
Weight: 112 KB
Volume: 12
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(73)90440-x

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