✦ LIBER ✦
A narrow process window for the preparation of polytypes of microcrystalline silicon carbide thin films by hot-wire CVD method
✍ Scribed by Norimitsu Yoshida; Sho Terazawa; Kotaro Hayashi; Tomonari Hamaguchi; Hironori Natsuhara; Shuichi Nonomura
- Book ID
- 119301159
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 317 KB
- Volume
- 358
- Category
- Article
- ISSN
- 0022-3093
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