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A Nano- to Macroscale Tribological Study of PFTS and TCP Lubricants for Si MEMS Applications

✍ Scribed by Brendan P. Miller; Nimel D. Theodore; Matthew J. Brukman; Kathryn J. Wahl; Jacqueline Krim


Publisher
Springer US
Year
2010
Tongue
English
Weight
460 KB
Volume
38
Category
Article
ISSN
1023-8883

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