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A multipurpose implanter with various target chambers for basic studies on the influence of ion bombardment on material properties

✍ Scribed by G. Frech; W. Ensinger; H. Müller; M. Hans; G.K. Wolf


Book ID
113283429
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
385 KB
Volume
68
Category
Article
ISSN
0168-583X

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