A multichannel flash tube implemented for large area annealing of ion implanted semiconductors: Juh Tzeng Lue, Vacuum, 32 (12), 1982, 713–718

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 147 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90542-1