✦ LIBER ✦
A Monté Carlo simulation study of high-dose and low-energy boron implantation into LPCVD-NiDoS polycrystalline thin films
✍ Scribed by S. Merabet; M. Boukezzata; P. Temple-Boyer; E. Scheid
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 646 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1369-8001
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