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A monolithic gas flow sensor with polyimide as thermal insulator

✍ Scribed by Stemme, G.N.

Book ID: 114595695
Publisher: IEEE
Year: 1986
Tongue: English
Weight: 672 KB
Volume: 33
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1986.22696

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