✦ LIBER ✦
A modifying algorithm of the topological VLSI layer by dummy filling features based on modeling the chemical-mechanical planarization
✍ Scribed by Amirkhanov, A. V.; Gladkykh, A. A.; Makarchuk, V. V.; Stolyarov, A. A.; Shakhnov, V. A.
- Book ID
- 121563683
- Publisher
- Springer
- Year
- 2014
- Tongue
- English
- Weight
- 363 KB
- Volume
- 43
- Category
- Article
- ISSN
- 1063-7397
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