A modified multi-chemicals spray cleaning process for post-CMP cleaning application

✍ Scribed by Y.-L. Wang; C. Liu; M.-S. Feng; W.-T. Tseng

• Book ID: 114194573
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 980 KB
• Volume: 52
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(98)80001-1