A modified metalorganic chemical vapor deposition chemistry for improved selective area regrowth

✍ Scribed by R.F. Karlicek Jr.; D.L. Coblentz; R.A. Logan; T.R. Hayes; R. Pawelek; E.K. Byrne

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 451 KB
• Volume: 131
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(93)90416-t