A modified ion source for semiconductor implantation purposes : A. Latuszynski, D. Maczka and Yu. V. Yushkievich and K. Kiszczak. Vacuum36(5), 263 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 135 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90293-9