✦ LIBER ✦

A modified high-intensity Cs sputter negative-ion source with multi-target mechanism

✍ Scribed by Si Houzhi; Zhang Weizhong; Zhu Jinhau; Du Guangtian; Zhang Tiaorong; Gao Xiang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A versatile high intensity plasma sputte

✍ G.D. Alton; Y. Mori; A. Takagi; A. Ueno; S. Fukumoto 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Further evaluation of the high intensity

✍ Y. Mori; G.D. Alton; A. Takagi; A. Ueno; S. Fukumoto 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 676 KB