✦ LIBER ✦
A modified Damascene electrodeposition process for bottom-up filling of recessed surface features
✍ Scribed by Chang Hwa Lee; Thomas P. Moffat
- Book ID
- 108120683
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 697 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0013-4686
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