A model of substrate surface roughness effect on the electrical properties of thin films : L. Toth. Vacuum 37 (1/2), 102 (1987)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 121 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90872-9