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A model for the gas-molecule transfer process by the intervane channels of the rotor of a turbomolecular vacuum pump

✍ Scribed by K. E. Demikhov; I. I. Pyzhov

Publisher: Springer
Year: 1977
Tongue: English
Weight: 321 KB
Volume: 13
Category: Article
ISSN: 0009-2355
DOI: 10.1007/bf01152913

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