A model for doped-oxide-source diffusion with a chemical reaction at the silicon-silicon dioxide interface

✍ Scribed by Utpal Kr. Chakrabarti

• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 147 KB
• Volume: 20
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(77)90058-2