A model for damage caused by cluster implantation: Non-linear effect due to damage overlap

✍ Scribed by Lin Shao; Michael Nastasi; Xuemei Wang; Jiarui Liu; Wei-Kan Chu

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 120 KB
• Volume: 242
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.08.194