A model for atomic mixing

✍ Scribed by M. Wadsworth; D. G. Armour; R. Badheka; R. Collins

• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 843 KB
• Volume: 3
• Category: Article
• ISSN: 0894-3370
• DOI: 10.1002/jnm.1660030210

✦ Synopsis

This paper is concerned with the theoretical determination of the amount of atomic mixing which accompanies the erosion of a solid surface exposed to an energetic ion beam. The work is relevant to sputter depth profiling where such mixing complicates the deduction of the initial depth distributions from the measured ion yields.

A mathematical model, which considers the effects of incident ion accumulation, ballistic relocation and diffusion is described. The governing integro-differential equations are solved numerically.

Results for a GaAs-AIGaAs multi-layer structure bombarded with 0 : ions are compared with results obtained experimentally.