A model-based methodology for the analysis and design of atomic layer deposition processes—Part I: Mechanistic modelling of continuous flow reactors

✍ Scribed by A. Holmqvist; T. Törndahl; S. Stenström

• Book ID: 116355025
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 620 KB
• Volume: 81
• Category: Article
• ISSN: 0009-2509
• DOI: 10.1016/j.ces.2012.07.015