✦ LIBER ✦
A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing
✍ Scribed by Ping Zhou, Dongming Guo, Renke Kang…
- Book ID
- 120742808
- Publisher
- Springer
- Year
- 2013
- Tongue
- English
- Weight
- 570 KB
- Volume
- 69
- Category
- Article
- ISSN
- 0268-3768
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