𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support

✍ Scribed by J.H. Jerman; D.J. Clift; S.R. Mallinson

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
779 KB
Volume
29
Category
Article
ISSN
0924-4247

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Fabry–Perot microcavity pressure sensor
Fabry–Perot microcavity pressure sensor with a novel single deeply corrugated diaphragm
✍ W. J. Wang; R. M. Lin; Y. Ren; T. T. Sun; D. G. Guo πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 171 KB

## Abstract A new Fabry–Perot (FP) microcavity structure with a novel single deeply corrugated diaphragm (SDCD) is presented for use in pressure sensing. Both analytical expression and finite‐element model (FEM) are used to evaluate the device's performance. The FP microcavity is fabricated on a si