𝔖 Bobbio Scriptorium

✦ LIBER ✦

A microwave power coupling structure for an electron cyclotron resonance plasma etcher

✍ Scribed by Haibou Ji; You Bi

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 262 KB
Volume: 43
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(92)90008-k

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