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A microwave discharge source operating at pressures of several atmospheres

✍ Scribed by V. M. Akimov; G. Witte; L. I. Kolesnikova; L. Yu. Rusin; J. P. Toennies

Book ID: 110167736
Publisher: Springer
Year: 2009
Tongue: English
Weight: 250 KB
Volume: 52
Category: Article
ISSN: 0020-4412
DOI: 10.1134/s0020441209030166

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