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A micromachined vibration isolation system for reducing the vibration sensitivity of surface transverse wave resonators

✍ Scribed by J. Reid; V. Bright; J. Kosinski

Book ID: 126706525
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 437 KB
Volume: 45
Category: Article
ISSN: 0885-3010
DOI: 10.1109/58.660162

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