✦ LIBER ✦
A Microfabricated Three-degree-of-freedom Parallel Mechanism: F. Behi, M. Mehregany, K. J. Gabriel, IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Acuators, Machines and Robots, Napa Valley, CA, USA, 1990. pp. 159–165. IEEE Service Center. Piscataway, NJ, USA
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 272 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0141-6359
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