Microfabrication of cesium vapor cells w
โ
M. Hasegawa; R.K. Chutani; C. Gorecki; R. Boudot; P. Dziuban; V. Giordano; S. Cl
๐
Article
๐
2011
๐
Elsevier Science
๐
English
โ 799 KB
This paper reports on the Si-glass anodic bonding process to fill micro Cs vapor cells with a buffer gas (Ar or Ne) at a controlled pressure (up to 20 kPa), which is one of the technological key steps to fabricate Cs vapor cells for miniature atomic clocks. In the atmosphere of these gases, the appl