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A microcomputer-based novel deposition controller for preparing films with graded composition

✍ Scribed by Shivalingappa, L.; Narasimha Rao, K.; Mohan, S.

Book ID: 117864818
Publisher: IEEE
Year: 2000
Tongue: English
Weight: 143 KB
Volume: 36
Category: Article
ISSN: 0093-9994
DOI: 10.1109/28.845074

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