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A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone

✍ Scribed by D. Homentcovschi, R. N. Miles, P. V. Loeppert, A. J. Zuckerwar


Book ID
120914939
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
981 KB
Volume
20
Category
Article
ISSN
0946-7076

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