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A micro-machined Pirani gauge for vacuum measurement of ultra-small sized vacuum packaging

✍ Scribed by Xuefang Wang; Chuan Liu; Zhuo Zhang; Sheng Liu; Xiaobing Luo

Book ID: 108263046
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 586 KB
Volume: 161
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2010.04.034

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