✦ LIBER ✦
A method of measuring moving characteristics of precision mechanical-translation stages using ultrasonic plane waves and applying it to a line-focus-beam acoustic microscopy system
✍ Scribed by Yuu Ono; Jun-Ichi Kushibiki; Noriyoshi Chubachi
- Book ID
- 112079844
- Publisher
- John Wiley and Sons
- Year
- 1995
- Tongue
- English
- Weight
- 679 KB
- Volume
- 78
- Category
- Article
- ISSN
- 1042-0967
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