A method for the removal of unwanted deposits from the interiors of vacuum coating units: D S Allam and P R Stuart, J scient Instrum, 42(4), 1965, 281

• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 20 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)92219-0