✦ LIBER ✦
A method for the determination of the stress in, and Young's modulus of silicon nitride passivation layers: A. G. van Nie. Solid-St. Technol. p. 81 (January 1980)
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 123 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0026-2714
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