A method for the continuous measurement of thickness and deposition rate of conducting films during a vacuum evaporation: J.A. Turner et al., J. Sci. Instrum., 40 (12), Dec. 1963, 557–561

• Publisher: Elsevier Science
• Year: 1964
• Tongue: English
• Weight: 73 KB
• Volume: 14
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(64)91133-9