A method for dosing solid sources for MOVPE: excellent reproducibility of dosimetry from a saturated solution of trimethylindium

✍ Scribed by Dario M. Frigo; Werefridus W. van Berkel; William A.H. Maassen; Guido P.M. van Mier; James H. Wilkie; Anton W. Gal

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 616 KB
• Volume: 124
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(92)90444-n