✦ LIBER ✦
A method for analysis and profiling of boron, carbon and oxygen impurities in semiconductor wafers by recoil atoms in heavy ion beams
✍ Scribed by M. Petrascu; I. Berceanu; I. Brancus; A. Buta; M. Duma; C. Grama; I. Lazar; I. Mihai; M. Petrovici; V. Simion; M. Mihaila; I. Ghita
- Book ID
- 113276718
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 296 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0168-583X
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