✦ LIBER ✦

A mathematical model for spin coating of polymer resists

✍ Scribed by Flack, Warren W.; Soong, David S.; Bell, Alexis T.; Hess, Dennis W.

Book ID: 115481874
Publisher: American Institute of Physics
Year: 1984
Tongue: English
Weight: 864 KB
Volume: 56
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.334049

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