A low-voltage, high-current, ion-bombardment source using magnetron principles

✍ Scribed by HA Ja'fer; RP Howson

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 199 KB
• Volume: 44
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(93)90188-g