✦ LIBER ✦
A low-temperature metal-doping technique for engineering the gate electrode of replacement metal gate CMOS transistors
✍ Scribed by J. Pan; C. Woo; M. Ngo; P. Besser; J. Pellerin; Qi Xiang; Ming-ren Lin
- Book ID
- 126639805
- Publisher
- IEEE
- Year
- 2003
- Tongue
- English
- Weight
- 255 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0741-3106
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